Abstract

Hamamatsu Photonics K.K. has developed a wide variety of optical sensors such as PMT, PD, Photo-IC, and Image-sensor since the establishment. Furthermore, MEMS technique will expand the possibility of the optical sensor drastically. We will develop an innovative optical sensor with the combination of our optical technique and MEMS technique. We call it MOEMS (Micro Opt Electro Mechanical Systems).

In this presentation, MEMS products, MEMS technology ,and a future development trend will be addressed.