CV

Chun-Wen Cheng is responsible for the MEMS technology development at tsmc. After received his BS degree in ME from NCTU in 1993, more than ten years’ semi-conductor experience on different technology including DRAM, e-fuse, embedded memory, SoC and 90nm CMOS platform with timely delivery enrich his creativity sharply. Then first 3 years in MEMS field as senior fab director of 6 inch MEMS foundry gave him in depth understanding on the gap between CMOS / MEMS and MEMS design / MEMS manufacturing. To resolve CMOS-MEMS integration challenge he joined tsmc in 2008. Within 10 years, he not only successfully delivered MEMS technology for various products to make tsmc become one of biggest MEMS foundry today, but also received a PhD in ME. from NTHU with support from tsmc and professor Weileun Fang. He has published 10 papers, and has been granted over 40 patents in the field of MEMS. Now he spends most effort on MEMS roadmap plan and execution for future MEMS manufacturing technology.