Abstract

New applications are expanding rapidly in our intelligent society. Specialty MEMS devices play a vital role in new technology revolution in our society, however, the lack of advanced and very large scale manufacturing facilities are the gating items for MEMS products commercialization. Foundry can provide large scale, high quality, cost effective and quick delivery manufacturing capability to MEMS designers. Smart fabrication can offer expandable and flexible solutions even on specialty process. Extended production line including CMOS ASIC, MEMS, 3D wafer level package and special module assemble will enable more complicated integration of front end and back end manufacturing.  Based on all above, fabless designers will be able to provide commercial MEMS products on a large scale to their customers. One stop service and one eco-system, including research at universities and institutes, prototyping at R&D process base and mass production at professional foundry, open the door for the advancement of supply chain in China.