Optical MEMS(MOEMS)Technology of HAMAMATSU
Sadaharu Takimoto
General Manager, MEMS, Solid state division
Hamamatsu Photonics K.K.
浜松ホトニクスの光MEMS(MOEMS)技術
瀧本 貞治 氏
浜松ホトニクス株式会社
固体事業部 MEMS部 部長
Abstract
Hamamatsu Photonics K.K. has developed a wide variety of optical sensors such as PMT, PD, Photo-IC, and Image-sensor since the establishment. Furthermore, MEMS technique will expand the possibility of the optical sensor drastically. We will develop an innovative optical sensor with the combination of our optical technique and MEMS technique. We call it MOEMS (Micro Opt Electro Mechanical Systems).
In this presentation, I will introduce our MOEMS products and MOEMS technology and a future development trend.
CV
Sadaharu Takimoto graduated from Musashi Institute of Technology in 1982, and joined the Hamamatsu Photonics K.K.
Since entering a company, Mr. Takimoto has been engaged in development of CMOS image sensor and the CCD image sensor.
In 2011, Mr. Takimoto was transferred to MEMS division and is directing production and development of MEMS products.