Abstract

MEMS which have not only circuits but also sensors, actuators by extended semiconductor fabrication have been playing important roles in systems. Its development requires basic technologies and knowledge of different fields, applications and past as well. The presentation is aimed at supporting new MEMS development by showing initial stages of MEMS used now. 

Pressure sensors were pioneered by piezoresistive type developed for automotive engine control by Dr. Isemi Igarashi in Toyota Central Research Laboratory. MEMS accelerometer was first developed at Stanford University as piezoresistive type. It was followed by capacitive type used as crash sensors for air-bag systems and lately used for user interfaces for smartphones being combined with gyroscopes and microphones.

In addition to these mechanical sensors, optical MEMS for mirror arrays for projectors, resonators for frequency sources and RF filters, fluidics for on-chip micro analytical systems and other MEMS have been developed and used.