MEF 2024 Program Schedule

SMART Society Driven by MEMS

Wednesday, April 17 - Thursday, April 18, 2024

KFC Hall, Ryogoku, Tokyo

Wednesday, April 17 (Japan time, UTC+9)

Time	Presentation Title	Speaker
09:00-09:10 Opening Remarks
09:00-09:10	Opening Remarks 開会の辞	Prof. Shuji Tanaka MEF Steering Committee Chair Professor, Tohoku University, Japan MEF組織委員会委員長東北大学　大学院工学研究科ロボティクス専攻　教授　田中秀治氏
09:10-10:40 Session 1: Latest Trend of MEMS
09:10-09:50	Keynote speech: Semiconductor Strategy in Japan 半導体戦略について	Dr. Takeshi Kobayashi Planning Officer, IT Industry Division Ministry of Economy, Trade and Industry (METI), Japan 経済産業省商務情報情報産業課　企画官小林健氏
09:50-10:15	Invited Speech: Trends, promising applications and ecosystem polarization – a status of the MEMS Industry	Mr. Jerome Mouly Deputy Business Line Director, More than Moore activities Yole Group, France
10:15-10:40	Invited Speech: The challenge of innovation driven by sustainability: ST vision on piezo MEMS	Dr. Carlo Luigi Prelini MEMs Technology Development STMicroelectronics s.r.l., Italy
10:40-11:40	Exhibitors' Flash Presentation
11:40-12:20	Lunch Hour
12:20-13:20	Break/Exhibit Hour
13:20-14:35 Session 2: Core Equipment Technologies and Foundries
13:20-13:45	Invited Speech: Building MEMS development and volume capability at Silex	Mr. Magnus Rimskog Sales Director Silex Microsystems AB, Sweden
13:45-14:10	Invited Speech: Overview of recent technological progress in MEMS at CEA-Leti	Dr. Pierre Damien Berger MEMS Business Development Manager CEA LETI, France
14:10-14:35	Invited Speech: Customization for all: The strategic role of High-Mix, Low-Volume MEMS Foundries	Ms. Jessica Gomez Founder & CEO Rogue Valley Microdevices, Inc., USA
14:35-15:50	Exhibitors' Flash Presentation
15:50-16:20	Break/Exhibit Hour
16:20-18:15 Session 3: Stateof the Art Technologies - Cutting Edge Process and Sensor -
16:20-17:00	Keynote Speech: A brief History and Future Outlook of Bosch Inertial-Sensors for Automotive and Consumer Applications	Dr. Georg Bischopink Mobility Electronics, VP, Product Area External Business for Automotive Sensors (ME-SE/PAE) Robert Bosch GmbH, Germany
17:00-17:25	Invited Speech: RF filter technology that enables mobile evolution モバイルの進化を可能にするRFフィルター技術	Dr. Hidekazu Nakanishi Director, BAW Development, Skyworks Filter Solutions Japan Co., Japan スカイワークスフィルターソリューションズジャパン株式会社ディレクター、BAW Development 中西秀和氏
17:25-17:50	Invited Speech: Advancements in Automotive high performance 3-axis Gyro MEMS: Technological Breakthroughs 車載グレード高精度ジャイロMEMSの進化	Mr. Yoshitaka Kato Senior Manager, Functional Deveices Division, Murata Manufacturing Co., Ltd., Japan 株式会社村田製作所機能デバイス事業部　機能デバイス商品開発3部シニアマネージャー加藤良隆氏
17:50-18:15	Invited Speech: Commercialization of high-performance micro birdbath resonator gyroscope (BRG)	Dr. Jae Yoong Cho President and CEO Enertia Microsystems Inc., USA
18:15-18:45	Break
18:45-20:00	MEF Networking Party

Thursday, April 18 (Japan time, UTC+9)

oTime	Presentation Title	Speaker
08:45-9:55 Session 4: Special Session/Keynote Speech
08:45-08:50	Introduction
08:50-09:15	IEEE Robert Bosch Award Commemorative Speech: Development and Commercialization of Deep Reactive Ion Etching (DRIE) Technology to contribute to further growth of MEMS MEMSの更なる発展に寄与するシリコン深掘り技術（DRIE）の開発と事業化/産業化	Mr. Susumu Kaminaga Representative Director & Chief Executive SK Global Advisers Co., Ltd. ＳＫグローバルアドバイザーズ株式会社代表取締役神永晉氏
09:15-09:55	Keynote Speech: Creating the Future with MEMS	Dr. Kurt Petersen Silicon Valley Band of Angels, USA
09:55-10:00	Break
10:00-12:00 Session 5: MEF 15h Anniversary Panel Discussion "The Past, Present, and Future of MEMS Technology"
	Moderator: Mr. Susumu Kaminaga, Representative Director & Chief Executive, SK Global Advisers Co., Ltd., Japan Panelists: Dr. Kurt Petersen, Co-Chair of HardTech Group, Silicon Valley Band of Angels, USA Prof. Weileun Fang, NTHU Chair Professor/Power Mech. Eng. Department, National Tsing Hua University, Taiwan Dr. Georg Bischopink, Mobility Electronics, VP, Product Area External Business for Automotive Sensors (ME-SE/PAE), Robert Bosch GmbH, Germany Dr. Masayoshi Esashi, CTO, MEMS CORE Co. Ltd., Japan Dr. Hiroki Kuwano, Senior Research Fellow, Professor Emeritus, Tohoku University, Japan Dr. Alissa M. Fitzgerald, CEO, A.M. Fitzgerald & Associates, LLC.
12:00-13:00	Exhibitors' Flash Presentation
13:00-13:40	Lunch Hour
13:40-15:10	Exhibit Hour
15:10-16:40 Session 6: New Areas for Innovation 1 - Materials and New Process -
15:10-15:50	Keynote Speech: From CMOS to MEMS	Prof. Weileun Fang, NTHU Chair Professor/Power Mech. Eng. Department, National Tsing Hua University, Taiwan
15:50-16:15	Invited Speech: Advanced Silicon Wafers for Optimized MEMS and RF MEMS Device Performance	Dr. Akiko Gadda Customer Tech. Support Manager Okmetic, Finland オクメティック社顧客技術サポートマネージャーイエッダ　晃子氏
16:15-16:40	Invited Speech: Ultrathick Low-Stress LPCVD Poly-Si Film for MEMS Application MEMS向け極厚膜低ストレスLPCVD Poly-Si膜	Mr. Hideharu Itatani Manager Process Development Department Ⅲ Process Development Division KOKUSAI ELECTRIC CORPORATION, Japan 株式会社KOKUSAI ELECTRIC プロセス開発本部　第三プロセス開発部　主任技師板谷秀治氏
16:40-16:45	Break
16:45-18:00 Session 7: New Areas for MEMS Innovation 2 - Sensing and Healthcare
16:45-17:10	Invited Speech: Metasurface optics for 3D sensing and beyond	Dr. Pawal Latawiec Chief Technology Officer Metalenz, USA
17:10-17:35	Invited Speech: Quantum Technology at Infleqtion	Dr. William Clark VP of Quantum Development Infleqtion, USA
17:35-18:00	Invited Speech: Development of Engineered Lipid Nanoparticles Using Microfluidics Devices エンジニアード脂質ナノ粒子の創成	Prof. Manabu Tokeshi Professor, Division of Applied Chemistry, Faculty of Engineering Hokkaido University, Japan 北海道大学大学院工学研究院応用化学部門、教授渡慶次学氏
18:00-18:05 Closing Ceremony
18:00-18:05	Closing Remarks	Prof. Taeko Ando MEF Steering Committee Vice Chair Professor, Ritsumeikan University, Japan MEF組織委員会副委員長立命館大学機械工学科　マイクロ・ナノ加工計測研究室　教授安藤妙子氏